LSTD is a reliable manufacturer of chemical mechanical polishing machines in China.Designed to meet precise chemical mechanical polishing demand of semiconductor wafers such Si, Ge, GaAs, InP, GaN ,SiC and so on. Machines are featured both dynamic stability and customized application. LSTD focused on semiconductor wafer polishing for over 10 years. Provide reliable semiconductor wafer polishing solutions for multiple semiconductor manufacturers worldwide.A professional designing team, process R&D team and machine building team as well as qualifiednecessary facilities provide a guarantee for the successful delivery of semiconductor equipment.
Basic Type--- Pressure plates of Basic Type machine follow up rotation of polishing plate.
Basic type adopts labyrinth single path polishing plate cooling structure to effectively ensure the
uniformity of heat dissipation and the maintenance of plate shape during polishing process, so as to ensure the polishing accuracy in terms of hardware. The used of large-size low friction cylinder specially designed and made by LSTD ensure the processing strength as well as the process accuracy.
CD Type --- CD Type machine are jointly driven by center guide.
Adding a set ofpressure plate center driven roller which drives four plate to rotate during process. This structure can eliminate the speed difference of the pressure plates caused by the different characteristics of air cylinders and the different polishing friction on each head, so as to better ensure the consistency of the polishing results of each head; And the polishing process is more flexible.
For IDP machines with large size, positioning and station switching of ceramic plates can be realized by adding internal and external guide rollers devices, so as to realize the loading and unloading in one station. It can also realize the connection of multiple machines by integrating manipulator to form an automatic production line.
LSTD produce different types of consumables: polishing powder, polishing slurry, polishing pad, polishing plate. There are various types of consumables, such as white aluminum, green silicon carbide, diamond, etc. Therefore, you can easily obtain the most suitable polishing medium that matches your chip type.
● Focus & Expertise
● Wider Covering of Target Market
● Closer to Customers
● Full range of product line
● Actively Marketing
● Matured cooperation model with supplier all over the world
● Integrated Know-how s in different industries
1. Customized products are customized according to customer needs, perfectly meeting customer needs.
2. Siemens PLC and Touch screen(4.3"),TECO motor, high quality accessories ensure product quality.
3. after-sales service, 7 * 24-hour online professional guidance at any time.
